四探针电阻仪

ResMap Four Point Probe

型号：美国CDE ResMap 178

技术参数：

﹡测量尺寸：2~8寸晶圆

﹡测量速度：大于49点/分钟

﹡测量范围：1mΩ sq^-1 ~5MΩ sq^-1

﹡测量重复性：≤±0.02%

﹡精确度：＜0.1%

Model: CDE ResMap 178

Technical Parameters:

﹡Wafer size: 2~8 inch wafer

﹡Measurement speed: 49 points/min or better

﹡Measurement range: 1mΩ sq^-1 ~5MΩ sq^-1

﹡Repeatability: ≤±0.02%

﹡Accuracy: ＜0.1%